 (Nikkei BP Group)
 (No.1 High-Tech News Site in Japanese)
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Hitachi Unveils IC Tech for Next Mainframe Computers
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September 30, 1998 (TOKYO) -- Hitachi Ltd. revealed details to Nikkei
Microdevices of the microchip technologies for its next-generation Skyline
II mainframe computer, including copper wiring for transistor interconnections.
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Copper wiring is attracting attention as a next-generation IC process
technology because it can reduce IC transmission delays. Earlier this
month, IBM Corp. introduced 400MHz PowerPC microprocessors using copper
wiring. From the second quarter of 1999, Texas Instruments Inc. will
start producing its Ultra SPARC III microprocessors (600MHz class devices)
and digital signal processors with copper wiring.
The product plan for the Skyline II was revealed when Hitachi Data Systems
Corp. (HDS) of the United States announced its new S/390 compatible
mainframe HDS Pilot Series.
Hitachi revealed to Nikkei Microdevices a variety of new IC technologies.
Hitachi will continue to use its current advanced CMOS-ECL (ACE) circuits
with CMOS and emitter coupled logic (ECL). Copper wiring and silicon-on-insulator
(SOI) technology will be utilized for microchips in the processor modules.
As part of a seven-layer metal process, copper will be used for the second
through seventh layers. A sputtering process will be used for the copper
deposition.
SOI wafers processed with a bonding method will be procured from Shin-Etsu
Handotai Co., Ltd. The wafer price is as much as four to five times
that of conventional wafers, company officials said.
The bonding type SOI wafers will be used because a silicon layer about
a micron in thickness is needed to process bipolar transistors. It is
difficult for an SOI wafer processed with separation by implanted oxygen
(SIMOX) technology to accept a deposit of a silicon layer of that thickness
on its insulating layer (SiO2), company officials said.
A 0.25-micron design rule will be used except for emitters of bipolar
transistors, to which a 0.20-micron design rule will be applied.
The performance per processor module of the Skyline II will increase
by as much as twice that of the current model to about 280MIPS. Its
configuration of modules will be raised from the current model's eight
units to 12 units. And thus, its performance per system will be improved
by as much as 2.7 times that of the current system.
The Skyline II for Japan will be sold at the same time as the model for
the U.S. market. It will follow the MP5800E in Japan, and the product
name is not finalized yet.
(Nikkei Microdevices)
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